Abstract
AbstractLarge scale periodic arrays of Co/Pt multilayer dots with perpendicular magnetic anisotropy are fabricated utilizing optical interference lithography with Ar+ ion lasers operating at wavelengths of 457nm and 244nm, respectively. The experimental technique allows us to fabricate dot-arrays with periodicities ranging between 125nm and 1100nm and with corresponding dot diameters between 70nm and 740nm. The dot-arrays are prepared on (100)-silicon substrates covering a total area of up to 20cm2 with a maximum dot density of about 4.1x1010dots/in2 as well as within the surface of (110)-silicon substrates. The global magnetic properties of the dot-arrays are characterized by the magneto-optical Kerr effect. The micromagnetic properties of a single Co/Pt dot are measured with quantitative magnetic force microscopy (QMFM) by using a MFM-tip, the magnetic properties of which have been calibrated within the point probe approximation with nanofabricated current carrying rings. This allows us to measure quantitatively the z-component of both the magnetization and the stray field of a Co/Pt dot on the nanometer scale.
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