Large range self-sensing atomic force microscope (LR-SAFM) for surface topography

Abstract

Atomic force microscopy (AFM) is considered primarily as a very precise tool for surface metrology. Surface features are reconstructed through scanning the surface by a silicon cantilever. The recent use of self-sensing piezo-resistive cantilevers has led to the development of self-sensing and self-actuating cantilevers and eliminates the need for the bulky conventional optical deflection measurement systems. A developed AFM system using such self-sensing self-actuating (PRSA) cantilevers has been integrated into a Nano Positioning and Nano Measuring Machine (NMM-1). The developed (PRSA_AFM) system has a measuring range of 25 mm × 25 mm × 5 mm which overcomes the limitation in the measurement range of conventional AFM systems. This large range self-sensing Atomic force microscope (LR-SAFM) has been successfully used for surface roughness measurement. A roughness standard of 0.261 µm R a was measured with a resolution of 0.1 nm. The roughness parameters are determined. The dynamic behaviour and accuracy of the developed system have been investigated.