Abstract
The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13mm or more and a high quality surface of a root-mean-square roughness of 0.18nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.
Highlights
Diamond, as one of the most effective optical and optoelectronic materials, has long been studied [1]
The unrivalled properties of wide transparency range [2], high thermal conductivity (2000 Wm−1 K−1) [3] and large Raman gain coefficient, along with recent advances in the growth of single crystal synthetic diamond [6] have led the material being one of the best choices to be used in Raman lasers [7]
Diamond Raman lasers are composed of a pump laser, diamond, and external mirrors used to form a laser resonator [5]
Summary
As one of the most effective optical and optoelectronic materials, has long been studied [1]. By forming micro-lens structures onto the diamond surface and coating with dielectric mirrors, a simpler, more compact and robust monolithic diamond Raman laser can be achieved. This monolithic diamond Raman laser needs minimal alignments of mainly the laser beam through the micro-lens and has no further requirements of external mirrors [9]. Diamond micro-lenses are fabricated by single-layer photoresist (PR) thermal reflow [10] to form PR micro-lenses and Ar/O2 inductively coupled plasma (ICP) etching to transfer PR micro-lenses [11] This approach yields simplicity, high reproducibility and high lens surface quality. Us to achieve monolithic diamond Raman lasers with a high conversion efficiency
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