Abstract
The kinetics of heterogeneous decomposition of methylsilane in a pumped hot-wall reactor were studied just below the critical partial pressure for homogeneous decomposition. The activation energies of the process derived from gas-phase conversion measurements and from deposition rates of SiC were found to be equal (about 230 kJ/mol). The nature of the diluent (H2, He, or Ar) has only a weak effect on the reaction order in methylsilane (m ≃= 1 ), as well as on the composition and structure of amorphous Si0.53C0.47 films.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
