Abstract
Complex surface structures have stimulated a great deal of interests due to many potential applications in surface devices. However, in the fabrication of complex surface micro-/nanostructures, there are always great challenges in precise design, or good controllability, or low cost, or high throughput. Here, we present a route for the accurate design and highly controllable fabrication of surface quasi-three-dimensional (quasi-3D) structures based on a thermal deformation of simple two-dimensional laser-induced patterns. A complex quasi-3D structure, coaxially nested convex–concave microlens array, as an example, demonstrates our capability of design and fabrication of surface elements with this method. Moreover, by using only one relief mask with the convex–concave microlens structure, we have gotten hundreds of target patterns at different imaging planes, offering a cost-effective solution for mass production in lithography and imprinting, and portending a paradigm in quasi-3D manufacturing.
Highlights
Complex surface structures have stimulated a great deal of interests due to many potential applications in surface devices
When writing a dot using a laser single pulse on a bilayer consisting of a rigid capping layer and a soft underlying layer and heating it to the glass-transition temperature (Tg) of the underlying layer for about 10 min, a dot-like bump can generate exactly in the position of the dot
An experimental result (Fig. 1b) demonstrates well uniformity of some isolated dot deformations in an Au (7 nm)/polystyrene (PS) (400 nm) bilayer, which is obtained under a laser pulse (3 mW, 150 ns) with a 300 nm spot size followed by heating at 108 °C, which is right above the Tg of polystyrene (PS, TgB105 °C)
Summary
Complex surface structures have stimulated a great deal of interests due to many potential applications in surface devices. We present a different route to fabricate various quasi-3D complex surface structures by introducing 2D laser-induced patterns (LiPs) as the precursors.
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