Abstract
Wurtzite (AlTi)N with high crystallinity has the NTC (negative temperature coefficient) thermistor property, which is applicable to an ultra thin temperature sensor on a thin polyimide film. The flexible sensor actually requires the mechanical reliability for operation, thus, the mechanical property, especially the toughness of the interface between an (AlTi)N thin film and a polyimide film was quantitatively evaluated by sub-micron scale fracture test. In addition, the effect of the fabrication process on the toughness was investigated with different types of specimens in order to elucidate the mechanism of the interface adhesion.
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