Abstract
This paper presents the possibility of fatigue lifetime prediction of polycrystalline silicon films under cyclic loading. Fatigue crack extension process determining fatigue lifetime was formulated by the well-known Paris law with two unknown parameters. These parameters were fit to the results of the tensile fatigue tests performed on specimens with three different conditions of etching damage. The optimum values and the average values of them were applied to predict fatigue lifetime distribution, which showed that fatigue behavior of polysilicon can be approximately estimated with common values of two unknown parameters of the Paris law.
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