Abstract

The unwrapped phase distribution on reference planes with different heights in grating project profilometry are analyzed and synthesized. Then a two-parameter second-order rational polynomial to express the uneven phases on every plane is proposed. A first-order Taylor series expansion is employed to obtain the polynomial coefficients of rational polynomial based on least-square iterative estimation method. By this method, phases on all the reference planes are retrieved precisely and extended to the full field. The results of experiences proved that the method not only can retrieve the phases distribution on the full field from parts reference planes, but geometrical parameter error, real reference plane profile error and random error are decreased, and coordinate measuring precision is also increased.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.