Abstract
Surface composition of Au-Cu(43 at%) alloy under 1.5–5 keV argon ion bombardment has been investigated by ion scattering spectroscopy (ISS). In this experiment, we adopted a specific technique to use mixed He + and Ar + ions as primary beam in order to perform sputtering (Ar +) and ISS measurement (He +) simultaneously. The outermost atom layer of Au-Cu alloys under Ar + ion bombardment is Au-rich leading to the conclusion that Ar + ion bombardment of AuCu alloys causes the preferential sputtering of Cu atoms, resulting in a Au-rich outermost atom layer and a depletion layer of Au atoms beneath the outermost atom layer due to ion-beam-enhanced surface segregation. This result explains the experimental results obtained by AES as well.
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