Abstract
Experimental results of investigation of optical properties of MgO thin films (thickness 10, 30, 100 и 300 nm) and AlN films (thickness 40 и 400 nm) on sapphire substrate are discussed. The optical phonon frequencies of these films are located in frequency region of surface polariton of sapphire. Due to the resonance between them the splitting and the shift of absorption spectra of sapphire surface polariton appear. From these experimental data it is possible to reconstruct all constants of the permittivity of both the film and substrate, the film thickness, and to specify its structure.
Highlights
Experimental results of investigation of optical properties of MgO thin films and AlN films on sapphire substrate are discussed
If the frequency of the optical phonons of the film lies in the region of existence of Surface polaritons (SP) substrate, by the resonance between them, there is a splitting of the bands and a shift of the absorption spectra of SP substrate
The resulting gap in this dispersion curves of SP substrate is proportional to the square root of the thickness of the film that allows you to measure the thickness of very thin films [1, 5-9]
Summary
Experimental results of investigation of optical properties of MgO thin films (thickness 10, 30, 100 и 300 nm) and AlN films (thickness 40 и 400 nm) on sapphire substrate are discussed. Surface polaritons (SP) are nonradiative electromagnetic excitations at the interface of two media, propagating along the interface, if the dielectric constant of the contacting materials have different signs [1,2,3,4]. From these experimental data can be restored all constant permittivity and the thickness of the film, and to characterize the film properties.
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