Abstract
Electron impact multiple ionization relative cross sections ofrare gas atoms (Ne, Ar, Kr and Xe) have been measured using apulsed electron beam and a pulsed ion extraction combined witha time-of-flight analysis of the charge. The measurements covera larger range of energies and charges than in earlierexperiments, from threshold to 1 keV and from charge n = 1 to 4 (Ne),5 (Ar), 7 (Kr) and 6 (Xe). The average number(γ) of electrons ejected from the atom per ionizationevent is calculated and used to evaluate the contributions ofthe inner-shell processes. The results are also compared withthose in the case of photon impact. As regards the majorions produced, relative uncertainty as low as 1.3% for theionization cross section ratios is achieved for all the samplegases, except near threshold. As for the γ-values,relative uncertainty is estimated to be as low as 1.2%.
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