IOn implantation part II: Ion implantation in nonelectronic materials

Abstract

Ion implantation provides a highly versatile means of modifying the near-surface composition of solids. Two principal areas of application have emerged so far: these are the improvement of wear resistance, especially under abrasive conditions, for steels, titanium alloys, tungsten carbide, etc., and the improvement of corrosion properties in the gas phase e.g. during thermal oxidation. Mechanisms by which these benefits are achieved are becoming better identified, but are relatively complex. Ion implantation has also become a valuable research tool for the preparation of materials in a nonequilibrium condition and for investigating impurity-defect interactions. Some of these are important in ion beam mixing and ion assisted coatings, both of these being techniques in which deposition is combined with ion implantation. Developments have taken place in the equipment for ion implantation of metals on an industrial scale, the second generation facilities now available providing substantially reduced unit costs by virtue of an increased scale of throughput.