Abstract
From two-dimensional particle-in-cell–Monte Carlo collisions simulations, the effect of chamber geometry on the ion flux is studied in a low gas pressure capacitive 2 MHz discharge. It is shown that the optimization of the reactor geometry significantly enhances the ion flux to the small electrode at a given applied voltage. The uniformity of the ion flux and the ion energy distribution at the electrode are studied for the applied voltage amplitude ranging from 2 to 4 kV. The dependence of sheath voltages from the ratio of driven and grounded electrode areas is discussed.
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