Abstract
In plasma immersion ion implantation the ions are accelerated from the plasma to the target. The total current, as delivered by the high voltage pulse generator, is only a qualitative reading of the ion flux density on the target. The main reason for this is a large secondary electron coefficient, which is strongly dependent on the ion energy and the surface composition. In this work direct time-resolved ion flux measurements are presented. High voltage pulses of eU 0=5, 10, 15 and 20 kV were applied to a spherical target with a small orifice. The ions were collected in the high vacuum region behind this orifice and their energy distribution was determined with a Faraday cup. The measured ion energy distribution function exhibits a sharp peak at the nominal energy eU 0 with the height decreasing during the voltage pulse, in agreement with the theoretical predictions for a collisionless transit through the plasma sheath.
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