Abstract

Ion beam induced growth of amorphous alloy films was realized in the Co–Nb system by ion beam assisted deposition. The amorphous forming range was about 28 to 68 at.% Co fractions. The formation mechanism of the amorphous phase, the phase competition and the phase evolution were discussed in terms of thermodynamics and kinetics far from equilibrium. Similar percolation patterns appeared in all amorphous alloy films. The fractal dimension of the percolation pattern in the amorphous film of Co 60Nb 40 was about 1.93, indicating 2-D layer growth of the amorphous phase. Ion beam bombardment during the film growing process played an important role in the growth mechanism of amorphous film.

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