Abstract
Abstract The paper is concerned with the analysis of surfaces and near-surface layers with monolayer depth resolution by means of high resolution Rutherford backscattering (HRBS) and elastic recoil detection (HERDA) of ions with an energy of a few MeV, in combination with an electrostatic spectrometer. With this instrument, which has recently been set up at the 6 MV Pelletron accelerator of the Max-Planck-Institut fur Metallforschung in Stuttgart, depth resolutions of 0.1 nm are obtained in HRBS and 0.3 nm in HERDA experiments. This paper gives a short outline of the design and performance of the spectrometer followed by various examples of applications. These comprise examples showing the analyzing power of the instrument, the analysis of an X-ray mirror by HRBS, the study of the initial oxidation of surfaces of aluminum single crystals by HERDA and recent results concerning charge exchange in ion backscattering.
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