Abstract
The implantation of ions into the silicon membrane masks of ion beam lithography is known to create compressive stress which leads to very serious distortion after only a few tens of exposures. In this article, we describe a new, dimensionally stable, protective coating for silicon membranes which meets the exacting requirements of very large scale integrated manufacturing. The coating is formed by first depositing a low density, low stress graphitic carbon film which is subsequently amorphized by He+ ion bombardment with a dose of about 125 mC/cm2. We show that the stress of these bilayer membranes is stable to within experimental error (±1 MPa) for 20 keV He+ ion doses up to 0.53 C/cm2, corresponding to about 8.5 million exposures in a 4×-ion projector.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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