(Invited) Flat-Panel X-ray Image Sensor Using Thin Film Transistors and Field Emitter Arrays

Abstract

Active matrix flat panel imagers (AMFPI) have been commercialized for a wide range of x-ray imaging applications. They have demonstrated superior imaging performance except in fluoroscopy, where the electronic noise degrades the image quality, making it inferior to x-ray imaging intensifier (XRII). In this paper we will present two FPI approaches under investigation to overcome the electronic noise limitation. They use an amorphous selenium layer with programmable avalanche gain to detect light generated from an x-ray scintillator upon x-ray absorption. Two charge readout methods are being investigated: a thin-film transistor (TFT) array; and a field emitter array (FEA). The amorphous selenium (a-Se) avalanche photoconductor is called HARP (high-gain avalanche rushing photoconductor). The avalanche gain of HARP depends on both a-Se thickness and applied electric field ESe. At ESe of > 80 V/μm, the avalanche gain can enhance the signal at low dose (e.g. fluoroscopy) and make the detector x-ray quantum noise limited down to a single x-ray photon. At high exposure (e.g. radiography), the avalanche gain can be turned off by decreasing ESe to < 70 V/μm, thus ensuring a wide dynamic range without burdening the readout electronics. The potential x-ray imaging performance of both FPI approaches, especially the aspect of programmable gain to ensure wide dynamic range and x-ray quantum noise limited performance at the lowest exposure in fluoroscopy, have been investigated.