Abstract
In the field of optical manufacturing, fused silica has a high and constantly growing application potential. Its material advantages, such as low thermal expansion and high thermal shock resistance, as well as its high transparency from the ultraviolet to the infrared spectral range, result in a large number of application fields. For example, manufacturing processes in semiconductor technology require high-quality quartz materials throughout the wafer handling process to avoid non-permissible contamination and to withstand the high process temperatures. Another example are monolithic components for fiber preform manufacturing, where internal contours with high aspect ratios (e.g. component length to component diameter) and high surface qualities are required to draw fiber types with special properties. The demands on the complexity and accuracy of these components are constantly increasing, which is accompanied by the need to analyse and optimize modern CNC manufacturing techniques more and more. In the following, investigations on the grinding of internal contours with a high aspect ratio are presented, in which the influence of an ultrasonic assistance as well as different machining strategies are considered.
Highlights
Introduction & MethodsFor the production of complex elements with internal contours with high aspect ratios in brittle-hard materials, the use of modern CNC technology and special tools are necessary
[3] the diamond grains (D16) are embedded in a special resin bond, which has a certain elasticity. This can be compared with polishing pads and, due to these special tool properties, a kind of ductile grinding is presumably produced, which results in partially transparent glass surfaces with a low resulting roughness
The kinematic principles and grinding parameters were kept constant and the influence of ultrasound on the surface roughness was analyzed on two different bore diameters (5 mm and 7.5 mm)
Summary
For the production of complex elements with internal contours with high aspect ratios in brittle-hard materials, the use of modern CNC technology and special tools are necessary. One possibility for surface finishing after grinding is the so-called ultra-fine grinding using resinbonded tools This enables average surface roughness that is already comparable with conventional pre-polishing. [3] the diamond grains (D16) are embedded in a special resin bond, which has a certain elasticity This can be compared with polishing pads and, due to these special tool properties, a kind of ductile grinding is presumably produced, which results in partially transparent glass surfaces with a low resulting roughness. In previous investigations on the insertion of holes of different diameters in the materials fused silica (Corning HPFS 79805F), ZERODUR® and CLEARCERAM®, which have already been presented in last year's abstract, it could already be shown that the surface roughness within the holes differ strongly in some cases, depending on the machining strategy used (deep drilling or helical drilling kinematics) and the measuring position (tool entry/exit). In previous investigations on the insertion of holes of different diameters in the materials fused silica (Corning HPFS 79805F), ZERODUR® and CLEARCERAM®, which have already been presented in last year's abstract, it could already be shown that the surface roughness within the holes differ strongly in some cases, depending on the machining strategy used (deep drilling or helical drilling kinematics) and the measuring position (tool entry/exit). [4] In the investigations presented here, these are examined in greater depth and extended to include the influence of ultrasonic support during pregrinding and subsequent ultra-fine grinding with different helical infeed depths and feed speeds
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