Investigations at High Temperature with Molecular Beam Mass Spectrometry Under Equilibrium and Kinetic Conditions

Abstract

This article includes equilibrium and kinetic orientated investigation with instruments using molecular beam mass spectrometry. In particular, the Knudsen Effusion Mass Spectrometer (KEMS), Skimmer Coupled Mass Spectrometer with Thermal Analysis System (STAMS), and High Pressure Mass Spectrometer (HPMS) are described. Four examples on complex systems of ashes including sulfates, chlorides, oxides, carbonates and hydroxides and measurements on aluminum nitride (AlN) as a potential material for application in microelectronics, electronic substrates, chip carriers, and light emitting diodes (LED) will be introduced. Finally, the transmission probability of the molecular beam in KEMS is discussed, based on relevant laboratory observations.