Abstract
Diamond wire sawing has gradually applied as the dominant way of silicon sawing in the photovoltaic and semiconductor industry. In this paper, a model of stiffness of wire web was established, and the corresponding test measure, process, and evaluation standard were proposed. Lack of stiffness of wire web could easily cause wire bow and further reduce the machining accuracy during diamond wire sawing. And the machining accuracy due to wire bow was analyzed. The special significance of this study is considered the stiffness of wire web to be the key index of multi-wire sawing performance. Through this method, the wire bow and the lack of cutting accuracy can be reasonably evaluated. As a result, wire lag and wire bow due to the loss of the stiffness of wire web could be minimized, as well as its influence on machining accuracy. Static stiffness matrices of wire web were presented to analyze the influence of the feed position and the number of wires forming the wire web on the stiffness of wire web. Moreover, a FEM model was established to find the influence factors such as wheel span, wheel diamond, and preset tension on the stiffness of wire web.Graphical abstract
Highlights
At present, the main processing methods for silicon wafer are diamond wire sawing and slurry wire sawing [1,2]
The static stiffness of the machine tool is mainly determined by the stiffness of diamond wire web, the static stiffness of wire web can be used as an important index to evaluate the performance of multi wire sawing machine tool
The static stiffness of wire web composed of different number of wires could be recognized by the coefficient of linear equation in the figure
Summary
The main processing methods for silicon wafer are diamond wire sawing and slurry wire sawing [1,2]. Similar to the traditional machine tool design, in order to improve the machining accuracy of diamond wire sawing, the stiffness design of wire web should be considered as a design item This is the main purpose of this paper. The static stiffness of the machine tool is mainly determined by the stiffness of diamond wire web, the static stiffness of wire web can be used as an important index to evaluate the performance of multi wire sawing machine tool. It will directly affect the machining accuracy, efficiency and surface quality. Measuring and evaluating the static stiffness of wire web is the basis to establish competitiveness of diamond wire sawing machine tool
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