Abstract
The moment method in statistical (SMM) dynamics is used to study the thermodynamic quantities of ZrO2 thin films taking into account the anharmonicity effects of the lattice vibrations. The average lattice constant, thermal expansion coefficient and specific heats at the constant volume of ZrO2 thin films are calculated as a function of temperature, pressure and thickness of thin film. SMM calculations are performed using the Buckingham potential for the ZrO2 thin films. In the present study, the influence of temperature, pressure and the size on the thermodynamic quantities of ZrO2 thin film have been studied using three different interatomic potentials. We discuss temperature and thickness dependences of some thermodynamic quantities of ZrO2 thin films and we compare our calculated results with those of the experimental results.
Highlights
Oxide thin films are used for multi-layer optical coatings, and multi-layer optical thin film devices
In the case of ZrO2 thin films with a thickness d increases to about 100 Å, the lattice parameters of ZrO2 thin films are similar to those of the bulk ZrO2
It should be noted that the statistical moment method permits an investigation of the temperature, pressure and thickness dependences of ZrO2 thin films
Summary
Oxide thin films are used for multi-layer optical coatings, and multi-layer optical thin film devices. Pure and doped CeO2 and ZrO2 (bulk and thin films) have attracted more attention because of its desirable properties, such as high stability against mechanical abrasion, chemical attack and high temperatures [1] [2]. These oxide thin films have been prepared by some con-. ZrO2 thin films were grown by thermal oxidation of metallic zirconium films deposited by sputtering of zirconium target by DC magnetron sputtering technique [14]
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