Abstract
The ion-beam sputtering (IBS) grid laser cleaning process is described as an alternative to manual cleaning and sandblasting in terms of surface morphology, roughness, and speed. It has been demonstrated that nanosecond fiber laser processing can be successfully used for controlled cleaning of complex grid surfaces at high speed and low surface impact, which is important for increasing the life of expensive parts. Under optimal conditions for single-pass processing, the scanning speed in the focal plane of a 160 mm F-Theta lens was 8 m/s at a laser pulse energy of 300 μJ, a pulse width of 120 ns, and a repetition rate of 100 kHz.
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