Investigation of surface acoustic wave fields in silicon crystals by x-ray diffraction: A dynamical theory approach

Abstract

X-ray diffraction spectra at different x-ray energies from a Si crystal subjected to a deformation produced by surface acoustic wave propagation have been modeled using the general framework of dynamical diffraction theory. The simulations have been successfully compared with the corresponding experimental results confirming the accuracy of the elastic model describing the acoustic wave fields inside the crystal.