Abstract
Optical properties (transmission and refractive index) and chemical structure (x-ray photoelectron spectroscopy) of a diamond-like coating (DLC) before and after focused ion beam milling (FIBM) process were investigated in this article. We find no influence of FIBM on optical properties and chemical structure of the DLC in the near-infrared region. The film can be used for optical applications. As an application example, a diffractive optical element (DOE) was directly fabricated on the film by FIBM. The measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.
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