Abstract
The objective of this research was to investigate the influence of spin coating process parameters on the thickness and surface roughness of Zinc oxide (ZnO) thin films using L9 Orthogonal Array. ZnO thin film was deposited on glass substrate at room temperature by sol-gel spin coating method. Spinning speed, spinning duration, volume of the solution and molar concentration of the precursor were studied as experimental factors. Molar concentration of the precursor significantly influenced both coating thickness and surface roughness. Combination of least coating thickness of 492 nm and best surface roughness of 3.27 nm was achieved at 5000 rpm spinning speed, 0.75 ml volume of the solution and 0.4 M Molar concentration of the precursor. But, the spinning duration was 30 seconds for the coating thickness of 492 nm and 60 seconds for surface roughness of 3.27 nm. Atomic Force Microscopy, X-ray diffraction and Scanning Electron Microscopy were used to analyze the surface morphology of the ZnO thin films.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: International Journal of Thin Films Science and Technology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
