Abstract
In the work the results of experimental researches of geometric and mechanical parameters of vertically aligned carbon nanotubes (VACNT) by atomic force microscopy (AFM) and nanoindentation are presented. Here is also shown the influence of diameter and length of the carbon nanotube on the value of bending stiffness and Young's modulus of nanotubes. The analysis of the experimental researches shows that the magnitude of bending stiffness significantly increases with the increasing of the diameter of the nanotubes and decreases with increasing length of the CNT. Diameter and length of the carbon nanotubes also have the most significant influence on Young's modulus of CNTs. The obtained results can be used to develop the processes of formation of micro-and nanoelectronic elements based on the VACNT.
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