Abstract
In this paper, we present a novel MEMS orthogonal fluxgate sensor fabricated by standard micro fabricated technology. The sensor mainly consists of a three-dimensional solenoid pick-up coil and a meander-shaped Co-based amorphous ribbon core. The experimental results demonstrate that the sensitivity and noise can be optimized by tuning operation conditions with excitation current amplitude and frequency. The fabricated sensor exhibits a maximum sensitivity of 575V/T, a wide linear range of ±480μT, and a perming below 0.8μT for 90mA rms sinusoidal excitation current at 500kHz frequency. The equivalent magnetic noise is 0.20 nT/√Hz at 1Hz, and the RMS noise is 1.09nT in the frequency range of 0.1–10Hz under the same excitation. In comparison with other micro fabricated fluxgates in similar dimensions, this device possesses relatively high sensitivity and low noise spectral density.
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