Abstract
The model of the nonlocal thermoelastic peak of low-energy ion is used in deriving an expression for intrinsic stress in multi-component material deposited from mixed beam of differently charged ions in modes of the direct current (DC) and pulsed bias potential. Calculation of intrinsic stress depending on bias potential in coating Ti1−xAlxN deposited from mixed ion beam Ti + Al with different component ratio is executed in modes of DC and pulsed bias potential at different substrate temperatures. It is shown that the increase of the content x of Al ions in the mixed beam and in deposited Ti1−xAlxN coating reduces the maximum of the stress curve σ(U).
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