Abstract
In the paper, it demonstrates highly integrated tenth-order filters in silicon-on-insulator (SOI). The micro-ring resonators have a small radius of 5μm and a very large free spectral range ~ 18nm at 1.55μm communication band. For through port responses, the grating and the high-order optic filters with ten coupled micro-ring resonators are designed and demonstrated, and grating responding well matches with the experiment resonators. Devices are patterned with electron-beam lithography (EBL). And 2μm SiO2 layer is covered on the silicon waveguide, thus reducing the propagation loss in micro-ring resonators.
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