Abstract

This paper presents, for the first time, an integrated microfluidic cooling scheme on multilayer organic liquid crystal polymer (LCP) substrate for high power X-band gallium nitride (GaN) devices and amplifiers. The channel is micromachined on LCP and a mixture of water and ethylene glycol is used as a coolant. A 3D electro-thermal model of the microfluidic channel has been created, which illustrates the advantage of having a micro-channel beneath LCP in the case of a static and moving fluid. Measurements were done at 10.5 GHz on a GaN power amplifier (PDC = 1.68 W, PAE = 15 %) that was placed both on LCP and on a microfluidic channel with a static fluid.

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