Abstract
AbstractThis paper describes the principles, design and testing of an instrument for the UV/Vis‐optical‐reflectance monitoring of homogeneity of the optical properties of thin films developed in our group. A 200 µm reflection probe, miniature fibre optic spectrometer and a home‐built computer controlled x–y mapping stage together with original data fitting software are the principal parts of the instrument. The results achieved show the usability of this instrument for the post‐production testing of samples of various optical thin films prepared by different technologies. By this instrument the gradients and other inhomogeneities of thickness and spectral optical constants (n, k) of thin films can be monitored. Copyright © 2004 John Wiley & Sons, Ltd.
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