Abstract
We present the development of time-of-flight/energy (TOF-E) telescope for elastic recoil detection analysis (ERDA) in UTTAC at the University of Tsukuba. The designs of the TOF tube are introduced. The performance for the quantification and mass resolution for light elements is confirmed on a CaTaOxNy film deposited on a Si substrate. The results are cross-checked by the data taken by an existing ΔE-E telescope ERDA system, which was previously installed in MALT at The University of Tokyo. The newly developed system can be used to reveal the relationship between the film deposition condition and the contamination quantitatively on a Si-Al-N (SiAlN) film on a SiO2 substrate. Finally, the analysis of a triple-layered metal nitrides film on a soda glass substrate, in which each layer has a thickness of 10 to15 nm, is shown. From the analysis of the surface peak of oxygen, the time resolution corresponds to depth resolution of 2.1 nm at the surface. The overall practical depth resolution conservatively estimated as better than 10 nm, because the depth profiles of various elements show clear counters corresponding to the three layers.
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