Abstract
We investigated the desorption dynamics of O2 and Cl2 molecules from electropolished stainless steel surfaces following Langmuir-Hinshelwood (i.e., delayed) heterogeneous recombination of oxygen and chlorine atoms, using the spinning-substrate technique. Near real-time elemental analysis by in-situ Auger electron spectroscopy showed that the stainless steel surface became rapidly coated with a Si-oxide-based layer (Fe:[Si+Al]:O = 1:2:9 for O2 and Fe:Si:O:Cl = 1:7:15:6 for Cl2), due to the slow erosion of the fused silica discharge tube and anodized Al chamber walls. For O atoms, the recombination probability was 0.09 {plus minus} 0.01 and was independent of the O flux impinging onto the surface. The recombination probability of Cl atoms ranged from 0.004 to 0.03 and increased with Cl-to-Cl2 number density ratio.
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