Abstract
The knife-edge technique in reflection mode is an alternative method for the characterization of in-plane motion and vibrations of microdevices. In this paper, we investigate this technique for sinusoidal vibration measurements of microresonators. First, we examine theoretically the effect of light reflection on the non moving substrate. It is shown that it has a significant effect on the sensitivity of the knife-edge technique to in-plane vibrations and that it introduces a slight sensitivity to out-of-plane vibrations. Then we demonstrate in-plane resonance measurements with a resolution in the nanometer range in the unfavourable case of a polysilicon resonator on a polysilicon coated substrate. Finally advantages, limitations and calibration issues of this technique are discussed.
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