Abstract
We present two InP-based quantum cascade detectors (QCDs) in the mid-infrared wavelength range. Their narrow band detection spectra are centered at 5.3 and 9μm. A vertical intersubband transition followed by a carefully designed extraction cascade, which is adapted to the LO-phonon energy, leads to 10K responsivities R of 3.2 and 9.0mA∕W and background limited detectivities DBLIP* of 2×108 and 3×109 Jones, for the 5.3 and the 9μm devices, respectively. Detection has been observed up to device temperatures of 300K (RT), albeit reasonable performance is restricted to temperatures below 150K (5.3μm) and 70K (9μm). Designed for zero bias operation, QCDs do not produce any dark current and therefore do not suffer from dark current noise and capacitance saturation at long integration times, making them ideal devices for large focal plane arrays.
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