Abstract
Easily integrated high-precision position sensor systems manufactured by means of MEMS technologies are presented in this work. Two contactless working principles, inductive and capacitive, have been brought in operation successfully. The inductive sensors detect the direction of vector magnetic fields. Combined with permanent magnets, they are optimized for high-resolution angular measurements within the joints of parallel robots. The capacitive linear transducers measure the changing differential capacity caused by the displacement of a flexible electrode between two fixed electrodes during the actuation of a parallel micro robot. Fabrication, characteristics and applications of both sensor systems are discussed.
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