Abstract
The initiation and growth of porous oxide on Ta was investigated in mixed H2SO4/HF electrolytes. Under selected potentiodynamic anodic oxidation conditions the formation of nearly uniform porous Ta2O5 layer was observed. The porous Ta2O5 layers consist of self-organized pore arrays with single pore diameters ranging from 2 to 10 nm. The morphology and the thickness of the layer depend strongly on the applied potential, the scan rate and on HF presence. The composition of the porous oxide layer is Ta2O5.
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