Initial stage oxidation on nano-trenched Si(1 0 0) surface
As the size of an electronic element shrinks to nanoscale, trench design of Si strongly influences the performance of related semiconductor devices. By reactive force field molecular dynamics (ReaxFF MD) simulation, the initial stage oxidation on nano-trenched Si(1 0 0) angled 60°, 90°, 120°, 150° under temperatures from 300 K to 1200 K has been studied. Inhomogeneous oxidation at the convex–concave corners of the Si surface was observed. In general, the initial oxidation process on the Si surface was that, firstly, the O atoms ballistically transported into surface, then a high O concentration induced compressive stress at the surface layers, which prevented further oxidation. Compared to the concave corner, the convex one contacted a larger volume of oxygen at the very beginning stage, leading an anisotropic absorption of O atoms. Afterwards, a critical compression was produced at both the convex and concave corners to limit the oxidation. As a result, an inhomogeneous oxide film grew on nano-trenched Si. Meanwhile, due to enhanced O transport and compression relaxation by increasing temperature, the inhomogeneous oxidation was more obvious under 1200 K. These present results explained the observed experimental phenomena on the oxidation of non-planar Si and provided an aspect on the design of nano-trenched electronic components in the semiconductor field.
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The carburization of transition metals in hydrocarbon pyrolysis is a common corrosion phenomenon in the petrochemical industry. Nevertheless, early events of carburization mechanism remain still unclear. The present work reveals the details at earlier stages of the Fe nanoparticles carburization in ethylene (C2H4) pyrolysis with reactive ReaxFF force field molecular dynamics simulations. Our results show that the chemisorption and dissociation of C2H4 on Fe surfaces are crucial steps to the carburization corrosion. First of all, C2H4 molecules are chemically adsorbed on the surface of the Fe nanoparticle. Afterward, continuous dehydrogenation of C2H4 occurs by C–H bond break to form C2Hx (x = 0–3). And finally, an amorphous C-rich carbide FeC3.39 is obtained. The carbide formation proceeds in four sequential and repetitive stages, including chemisorption and dehydrogenation of C2H4 on the surface of the Fe nanoparticle, diffusion and polymerization of C2Hx to form short C chains on the surface and in the ...
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14
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