Infrared optical properties of diamond films and electrical properties of CVD diamond detectors

Abstract

In this paper, the infrared optical properties of diamond films grown on silicon substrates by means of the microwave plasma chemical vapour deposition (MPCVD) method were first studied by infrared spectroscopic ellipsometry in the photo energy range of 0.1–0.4 eV. Using the effects of annealing treatment on the extinction coefficient k and refractive index n of diamond films, the infrared optical quality of the diamond film can be significantly improved by thermal annealing treatment in N2 atmosphere. After annealing the value of k was about 10−12–10−15. However, for the non-annealed diamond film, the value of k varied in a large range, about 10−3–10−14. After annealing the refractive index n of the diamond film increased and was close to that of a single crystal, Type IIa natural diamond. The graphite on the diamond surface can be removed to some extent after surface oxidizing treatment of the diamond film in a solution of H2O2 and H2SO4, which causes the obvious decrease of the leakage current of the CVD diamond detector. Based on these diamond films, diamond x-ray detectors with a response time of about 3 ns were fabricated. From the temperature behaviour and the time response of the CVD diamond detector to x-ray irradiation, we find that the various defects or impurities that exist in the film may be responsible for the long fall time.