Abstract
The effect of silver ions on the physicochemical properties of methyl methacrylate-methacrylic acid copolymer films, namely, film-forming properties and resistance to fluorine-containing plasma, acid etchers, and temperature, was studied by lithography, derivatography, atomic-force microscopy, and optical spectroscopy. The activation energies were calculated for thermal transformations in the copolymer with and without silver ion additions, when heated in air to 300°C.
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