Abstract
It is known that residual chlorine is a significant drawback for plasma-enhanced chemical vapor deposited (PECVD) coatings when chloride is used as precursor. Studies have been conducted on depressing the chlorine fraction in the coating layer yet the results are somehow plausible. In this study effort has been focused on the preparation of the interface. Argon-ion bombardment is employed at the beginning of the coating process when the coated layer is less than 100 nm thick. Suddenly stopping the inlet of TiC14 followed by high-energy argon-ion bombardment can help the chamber recover to its designated temperature and build up normal plasma intensity. The high-energy argon ions are also good to densify the layer and decrease the residual chlorine content. The experimental results show that the bonding strength of this process is higher than that of the regular process and the wear resistance is improved. The increased corrosion resistance is even better than that of stainless steel.
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