Abstract
The microstructure and the scaling properties of films grown by plasma enhanced chemical vapor deposition are reproduced with a discrete model that takes into account the angular distribution function of the particles and the lateral growth of the films. Both the experimental and simulated surfaces exhibit a granular microstructure and an anomalous scaling behavior characterized by values of the growth exponent beta that vary with the scale of measurement. Depending on the angular distribution function used in the model, values of beta ranging from 0.86 to 0.2 are obtained.
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