Abstract
Gallium-doped magnesium zinc oxide (GMZO) thin films were deposited onto glass substrates using RF magnetron sputtering using GMZO ceramic targets under different sputtering conditions. The substrate temperature and deposition pressure effects on the structural, electrical and optical properties of the GMZO thin film were investigated. Transparent conductive GMZO thin films were demonstrated in this study to possess a wurtzite structure, average transmittance above 80% in the 400nm and 800nm wavelength range with a low resistivity of 1.62×10−3Ωcm when deposited onto glass substrates using RF magnetron sputtering.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
