Abstract
Ion beam sputter deposition of austenitic stainless steel leads to the formation of a model system for surface adsorption, diffusion and phase formation during nitrogen implantation at elevated temperatures. The same dependence on the base pressure as for bulk material was found for the nitriding efficiency while a similar diffusivity was observed, despite a grain size of 50–100 nm for the thin films. Even at 360 °C, CrN was observed after nitrogen implantation for the films, compared with expanded austenite formed in bulk steel.
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