Abstract

A series of FeCoHfO granular films were fabricated by reactive DC magnetron reactive sputtering at varying partial pressure of oxygen and annealed by magnetic field thermal annealing. By using magnetic field annealing method suitably, the soft magnetic properties of FeCoHfO granular thin films are improved obviously. The optimal annealing temperature and annealing time are 350 °C and 20 minute, respectively. The films with desired properties of low coercivity, Hc~2Oe, relatively high saturation magnetization, 4pMs~20.5 kG, high anisotropy field Hk~50Oe, and high electrical resistivity r ~ 1875mWcm and natural ferromagnetic resonant frequency about 3 GHz have been obtained.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.