Abstract
The influences of the ionization processes in the target, and of the charge state of the incident ions on atomic collision processes are studied in elementary and compound semiconductors. The radiation damaging and sputtering experiments, which are presented here, suggest that ionization enhances atomic displacement processes. Charge-state-dependent influences on nuclear and electronic processes are only observed within the first few nanometers of the ion trajectory.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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