Abstract
In this study, lead-free Bi0.5(Na0.80K0.20)0.5TiO3 (BNKT) ferroelectric films, with different thicknesses on Pt/Ti/SiO2/Si substrates, were formed via chemical solution deposition at a crystallization temperature of 700 °C. X-ray diffraction analysis revealed the characteristic peaks of the rhombohedral symmetries. Ferroelectric properties and leakage current density of BNKT films were analyzed as a function of the thickness. When the thickness increased from 200 nm to 600 nm, ferroelectric properties and leakage current behavior of the films were remarkably improved. The remnant polarization (Pr) was enhanced from 2.37 µC cm−2 to 8.41 µC cm−2 at applied electric field of 150 kV cm−1 and leakage current density (J) at electric field of 40 kV cm−1 declined from 12.4 × 10−4 A cm−2 to 2.6 × 10−4 A cm−2.
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