Influence of electrochemical micromachining parameters during generation of microgrooves

Abstract

Fabrication of microparts has become increasingly important with an advancement of product miniaturization in various fields. Microgrooves are used as one of the key microfeatures in many microproducts like microthermal devices, microheat exchangers, microreactors, micropumps, and micromechanical systems. Electrochemical micromachining (EMM) can be effectively utilized for the fabrication of microgrooves because of its important benefits like reusability of the tool, no stress, burr-free surfaces, and ability to cut the material irrespective of the hardness. This paper presents the influence of EMM parameters like applied voltage, pulse frequency, duty ratio, tool feed rate, and electrolyte concentration on the machining accuracy, i.e., width overcut, depth overcut, and material removal rate during fabrication of a 500 μm-deep microgroove in stainless steel. An in situ-fabricated tungsten microtool of 110 μm diameter was used to generate a microgroove using the developed EMM setup. A high-quality microgroove with 55 μm width overcut and 10-μm depth overcut with an aspect ratio of 2.31 was fabricated using the optimum setting of machining parameters.