Abstract
In principle, one expects from a method for the determination of thicknesses of thin overlayers no angular dependence (take-off angle ϵ) of the results, which means d/λ = const. Earlier investigations, however, gave evidence for such a constant response of d/λ versus ϵ only up to about ϵ = 40 to 70° (depending on the value of d/λ) followed by a drop. This drop is explained by the finite solid angle of detection and elastic scattering of photoelectrons. As a concentration gradient exists in the interface, a horizontal portion ( d/λ = const.) is only obtained for thick overlayers on thin interfaces. Surface roughness causes a restriction of the horizontal portion and in addition systematic errors.
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